基于PSD的二维定心激光扫描器摆角测量系统  

Deflection angle measurement system using PSD for a 2 DOF laser scanner

作　　者：程继伟[1] 巩马理[1] 贾维溥[1] 刘兴占[1] 闫平[1] 张海涛[1] 

机构地区：[1]清华大学精密仪器系,北京100084

出　　处：《红外与激光工程》2003年第1期57-60,共4页Infrared and Laser Engineering

摘　　要：介绍了二维定心激光扫描器的工作原理和结构设计,描述了采用光电位置敏感探测器(PSD)实现的二维摆角测量系统,比较了两种不同测量方式的优劣,包括数学模型、计算公式和光学系统构造。给出了PSD信号处理电路框图,设计了消除暗电流和杂散光干扰的采样-保持电路,并对系统位移做了标定。系统可以实现30°圆锥角的大范围二维摆角测量,角分辨率达0.01°,具有实时性强、工作稳定、抗环境干扰能力强等优点。The basic principle and structural design of 2 DOF tip/tilt laser scanner are introduced. Two different methods to measure the 2 DOF deflection angle of the scanner are discussed, including their mathematical models, computing expression and optical systems. The aspects of PSD output signal processing circuit and sample\|hold circuit to eliminate the environmental noise are presented. Displacement calibration demonstrates that the system can reach a wide measurement range of 30° and angle resolution of 0.01° as well as fast response and high stability. \;

关 键 词：二维定心激光扫描器 激光扫描器 位置敏感探测器 角测量 PSD 工作原理 

分 类 号：TP334.22[自动化与计算机技术—计算机系统结构] TN249[自动化与计算机技术—计算机科学与技术]