金属氧化物纳米点薄膜的模板法合成  

Template Synthesis of Metal Oxide Nanodot Films

作　　者：郜涛[1] 孟国文[1] 张立德[1] 

机构地区：[1]中国科学院固体物理研究所,合肥230031

出　　处：《中国科学院研究生院学报》2003年第1期69-72,共4页Journal of the Graduate School of the Chinese Academy of Sciences

基　　金：国家自然科学基金(199740 5 5); 973(199945 0 6)资助项目

摘　　要：报道了一种简便的金属氧化物纳米点薄膜的合成方法.首先制备了具有有序纳米凹坑阵列的多孔阳极氧化铝模板,然后在模板表面真空蒸镀金属薄膜,对所制备的金属薄膜进行氧化处理,得到了具有有序纳米点阵列的金属氧化物纳米点薄膜.纳米点的直径约为 1 0 0nm,高度约为 45nm,以六边形有序排列,密度约为 2× 1 0 1 3个/m2 .A simple and convenient synthesis approach for metal oxide nanodot films has been reported. Porous anodic alumina (PAA) films with ordered nanocave arrays were fabricated firstly and used as template materials. Then the metals were evaporated on the surface of the PAA template following with oxidization in air. The prepared metal oxide thin films have highly ordered hemispherical nanodot arrays arranged in a hexagonal pattern. The density of the nanodots in the array is about 2×10 13 /m 2 with dot diameters and heights about 100 nm and 45 nm, respectively.

关 键 词：纳米点薄膜 模板法 合成方法 金属氧化物 纳米材料 纳米结构 

分 类 号：TB383[一般工业技术—材料科学与工程]