扫描探针显微镜在粗糙度、纳米尺寸、表面形貌观测方面的应用  

THE APPLICATION OF SCANNING PROBE MICROSCOPE IN OBSERVING AND DETERMINING THE ROUGHNESS, NANO-SCALED SIZE AND SURFACE TOPOGRAPHY

作　　者：游俊富[1] 王虎[1] 赵海山[1] 

机构地区：[1]中国上海测试中心,上海200233

出　　处：《理化检验（物理分册）》2003年第3期146-150,共5页Physical Testing and Chemical Analysis(Part A:Physical Testing)

摘　　要：扫描探针显微镜是近十几年来在表面特征、表面形貌观测方面最重大的进展之一 ,是纳米测量学的基本工具。叙述了扫描探针显微镜的工作原理、检测模式及在观察检测纳米级的粗糙度、微小尺寸、表面形貌方面的特点和方法 ,比较了原子力显微镜、常规的表面轮廓仪、干涉显微镜、扫描电子显微镜在表面特性、表面形貌观测方面的性能 ,着重介绍了扫描探针显微镜在粗糙度、纳米尺寸、表面形貌观测方面的应用和存在的问题。The scanning probe microscope is one of the most important developments on observing and determining surface topography and surface properties in near ten years and is basic tool of nano-measurement.The principles,measuring modes,features and determination methods for observing and determining the roughness, nano-scale size and surface topography by SPM are described. The properties on observing and determining surface topography and surface properties of atomic force microscope, stylus-type roughness gauge, interferometer and scanning electron microscope are compared. The application and present problems of SPM in observing and determining the roughness, micro or nanoscale size and surface topography are particularly introduced.

关 键 词：观测 扫描探针显微镜 粗糙度 表面形貌 纳米尺寸 工作原理 

分 类 号：TG8[金属学及工艺—公差测量技术] TH742[机械工程—光学工程]