用于光盘存贮器沟槽参数测试的光学衍射方法(英文)  

Optical Diffraction Method for Disk-memory Groove Parameters Testing

作　　者：王海明 王淑荣[1] 

机构地区：[1]应用光学国家重点实验室

出　　处：《光学机械》1992年第1期19-25,共7页

摘　　要：光盘存贮器有非常精密的沟槽。用衍射法进行测量,由于要引用大衍射角计算,沟槽的菲涅尔系数不再恒定,因此应用很广的弗朗和费理论不适于描述光盘沟槽的衍射。这种情况下,我们提出了一个研究此种衍射的方法,进一步讨论了一些基本因素。例如:沟槽形状的影响,基底多重反射对衍射图样的影响,特别是当基底不完全平行时的影响等等。最后,建立了一种测量沟槽参数的技术。The optical disk-memory has very fine grooves.The widely applied Fraunhofer theory fails to describe the diffraction since large diffr- action angle should be taken into account and the Fresnel coeffici- ents at the grooves are no longer constant.Under the circumstances, a method has been developed to study this diffraction problem;furt- hermore,some essential factors,such as the influence of the groove form,the contribution of the multiple reflection at the substrate surfaces to the diffraction patterns,particularly when the substrate is not perfectly parallel,and so on,have been discussed.Finally a diffraction technique for testing groove parameters has been establi- shed.

关 键 词：光盘存贮器 沟槽 参数 光学衍射 

分 类 号：TP333.43[自动化与计算机技术—计算机系统结构]