高密度微小透镜面列阵研制  

FABRICATING OF HIGH-DENSITY ULTRA-MICROLENS ARRAY

作　　者：朱传贵[1] 刘德森[1] 薛鸣球[1] 阎国安[1] 

机构地区：[1]中国科学院西安光学精密机械研究所,西安710068

出　　处：《光子学报》1992年第4期310-315,共6页Acta Photonica Sinica

基　　金：国家863计划资助

摘　　要：用光刻、离子交换法在玻璃基底上制作了直径分别为40μm,20μm、10μm,总透镜数18万以上的高密度微小透镜面列阵,对其主要参数进行了测量。给出的显微成像照片说明,它们都具有良好的成像质量。最后,在理论分析和实验研究的基础上,给出了透镜微小化极限的判据。The high-density ultra-micro lens arrays with diameters of 40********um, 20*********um,10 10nm respectively and more than 18*********x104 lenses each in total were fabricated using ion-exchanging technique, and their main parameters were measured.The microscopical imaging photographs given have shown that their imaging quality was all good, In the end, the limit criterion for lens miniaturizing limit was obtained on the basis of theoretical and experimental research.

关 键 词：透镜 变折射率 光学 折射率 

分 类 号：TN74[电子电信—电路与系统]