外界振动对SPM测量结果的影响  

External Vibration Influence on SPM Measuring Results

作　　者：胡小唐[1] 陈津平[1] 胡晓东[1] 郭彤[1] 陈峰[1] 

机构地区：[1]天津大学精密测试技术及仪器国家重点实验室,天津300072

出　　处：《天津大学学报（自然科学与工程技术版）》2003年第2期143-147,共5页Journal of Tianjin University：Science and Technology

基　　金：教育部科学技术重点基金资助项目(02043);国家高技术研究发展专项基金资助项目(2002AA404090).

摘　　要：探讨了外界激振对扫描探针显微镜(SPM)扫描图像的影响.针对DI扫描探针显微镜MultiModeTMSPM,以Tektronix任意波形发生器AWG2021驱动PC扬声器作为激振源,以SIOS微型激光干涉测振仪SP S为测振系统,研究了0～7kHz频带内SPM机体的简谐迫振对扫描图像的影响.实验表明,针尖 样品副所受激振影响不同于SPM机体;0～1kHz频带内的激振影响显著,再高频段则影响甚微;外界激振与SPM扫描的综合作用影响成像的结果;针尖 样品副的粘弹性模型是SPM振动影响研究的指导理论.The influence of external vibration on scanned images of scanning probe microscope(SPM)is discussed.The object studied is DI MultiModeTM SPM.The vibrating source is a PC speaker driven by Tektronix ambient waveform generator AWG2921.A SIOS miniature interferometric vibrometer SPS is used as vibration measuring system.The influence of 0～7 kHz harmonic vibration of SPM′s base on the images scanned is studied .The results of experiments are concluded:external vibration influence on SPM base is different from the one on tipsample interaction;great influence of external vibration appears in 0～1 kHz,and weak in higher frequency ranges;SPM image is influenced by the combination of external vibration and scanning frequency;viscoelastic model of the tipsample interaction is the theory for studying vibration influence on SPM.

关 键 词：外界激振 扫描探针显微镜 针尖-样品副 粘弹性模型 

分 类 号：TN16[电子电信—物理电子学]