材料表面硬度及形状的AFM分析方法  

Microrigidity and Profile Analysis Method with AFM

作　　者：刘庆纲[1] 李德春[1] 王战[1] 胡晓东[1] 胡小唐[1] 清野慧[2] 

机构地区：[1]天津大学精密测试技术及仪器国家重点实验室,天津300072 [2]日本东北大学工学部

出　　处：《天津大学学报（自然科学与工程技术版）》2003年第2期174-177,共4页Journal of Tianjin University：Science and Technology

基　　金：天津市自然科学基金资助项目(013602111);教育部天津大学南开大学科技合作项目.

摘　　要：利用AFM测量软性材料如聚合体、生物物质时,AFM探针对被测软性材料表面施加一定的力而引起材料表面产生变形.通过测力 位移曲线,基于AFM测力 压痕曲线分析,探讨了减轻该影响并获得高精度软性材料表面形状测量结果的方法,进而计算材料表面微观杨氏弹性模量.该方法不仅可决定物体的表面弹塑性,获得高精度的表面形状测量结果,而且通过了解物体变形机理,进一步分析材料的微观特性.There is the large deformation of the sample's surface caused by contact force between AFM tip and sample surface when using an AFM to image soft samples such as polymers or biological objects. This deformation can be revealed directly in the forceindentation curves. In this paper, we calculate the local Young's moduli E based on the forceindentation curves with AFM, and discuss the method to lighten the influence mentioned above to obtain high resolution images of soft samples with our AFM used in liquid. This method can be used not only to determine local elasticity for imaging the surface with high resolution, but also to analysis the microcosmic characteristics by understanding the deformation mechanism of materials.

关 键 词：测力-压痕曲线 原子力显微镜 杨氏弹性模量 微硬度 

分 类 号：TN16[电子电信—物理电子学]