圆对称衍射光学束匀滑器件的精细化设计  

Precise Design of Circular-symmetrical Diffractive Optical Element for Beam Smoothing

作　　者：王金玉[1] 谭峭峰[1] 严瑛白[1] 金国藩[1] 

机构地区：[1]清华大学精密测试技术与仪器国家重点实验室,北京100084

出　　处：《中国激光》2003年第3期206-210,共5页Chinese Journal of Lasers

基　　金：国家高技术项目 (86 3 80 4 );国家重点基础研究项目 (973 G1 9990 330 );中国博士后科学基金资助项目

摘　　要：利用爬山 模拟退火混合优化算法 ,对圆对称衍射光学束匀滑器件进行了精细化设计。对比选取不同的焦面采样间隔进行的束匀滑器件的设计结果 ,发现其采样间隔严重影响设计结果的真实性 ,设计计算中仅仅满足采样定理是不够的。为了获得真实的束匀滑分布 ,采样间隔必须小于 /等于 0 5倍传统采样间隔 ,只有这样才能同时控制住焦面采样点和其他非采样点处的光强分布 。In this paper, by using the hybrid algorithm merging hill climbing with simulated annealing, the precise design of the circular symmetrical diffractive optical element (DOE) for beam smoothing is completed. By comparing between the designed results of different sampling interval on focal plane, it is found that the facticity of designed result is greatly influenced by the sampling intervals. During the designing process, it is insufficient to sample only according to the sampling theory. To get the faithful intensity distribution for beam smoothing, the sampling interval must be less than or equal to 1/2 of the traditional sampling interval. Only under this condition, both the intensity of samples and other points on focal plane can be controlled to meet the requirements of beam smoothing.

关 键 词：物理光学 衍射光学器件 混合优化算法 束匀滑 精细化设计 

分 类 号：O436.1[机械工程—光学工程]