适合于液相检测的乐甫波传感器  

Love Wave Sensor for Being Fit for Operating in Liquids

作　　者：潘海峰[1] 朱惠忠[1] 冯冠平[1] 

机构地区：[1]清华大学精密仪器与机械学系,北京100084

出　　处：《仪表技术与传感器》2003年第3期10-12,共3页Instrument Technique and Sensor

基　　金：国家自然科学基金 (39970 644);清华大学机械工程学院"985"基金的资助

摘　　要：乐甫波 (Lovewave)是声表面波的一种 ,它是在沉淀于压电基片表面的薄层声波导中传播的表面剪切横波。论述了基片为ST切压电石英晶体、声波导层分别为聚甲基丙烯酸甲酯 (PM MA)和熔融石英 (SiO2 )的乐甫波器件的制作。通过测量器件的传输参数S2 1和插损 ,比较了瑞利波器件和不同声波导层构成的乐甫波器件在气相和液相的特性 ,证明了乐甫波传感器适合于液相检测而瑞利波传感器不适合 ,而且 ,SiO2Love wave is one type of the surface acoustic waves (SAWs).They are surface guided,shear-horizontally polarized waves (SH waves) propagating in a thin layer deposited on a substrate.The Love wave devices with the substrate of ST-cut quartz and the guiding layers of PMMA and fused quartz were fabricated successfully.By measuring the transfer function S 21 and the insertion loss of the devices,the characteristics of the Rayleigh wave device and the love wave devices with different guiding layers in gas phase and liquid phase were compared.It was validated that the Love wave sensor is suitable for testing in liquids but the rayleigh wave sensor is not.What's more,SiO 2 is the more proper material for the guiding layer of the Love wave device.

关 键 词：乐甫波器件 乐甫波传感器 液相 插损 声表面波 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]