基于有限元分析的纳米级微进给平台设计  

Design of a nanomicro-positioning work piece table based on finite element analysis

作　　者：阎兵[1] 田延岭[2] 张大卫[1] 张铁城[1] 

机构地区：[1]天津职业技术师范学院,天津300222 [2]天津大学机械工程学院,天津300072

出　　处：《天津职业技术师范学院学报》2003年第1期1-4,共4页Journal of Tianjin Vocational Technical Teachers'college

基　　金：天津市自然科学基金项目(013605311)

摘　　要：设计了一种利用弹性铰链作为预紧机构、高精度滚动导轨作为导向机构的单PZT驱动的微进给平台。利用有限元方法对微进给平台的结构和静、动态特性进行了研究。在静态特性中着重分析了微进给平台的静态刚度,得出整个动平台的工作平面上的刚度分布图。在动态特性分析中着重研究了微进给平台的模态振型、固有频率和谐波激励响应,得出了激进给平台在动态激振力作用下的特性。最后分析了微进给平台工作平面上静态刚度和动态刚度变化很大的原因,并提出一些改进的措施。This paper presents a kind of single PZT actuator micro positioning work piece table, which uses flexure hinges as pre-load mechanism and a high-precis ion rolling guide support mechanism. With the aid of Finite Element Analysis software, research has been done on the static and dynamic character of the micro-positioning work piece table. In the static analysis, study mainly focused on the static stiffness and in obtaining the static stiffness distribution of the whole work piece table. While in the dynamic analysis, researches principally centered on the vibration mode, inherent frequency and respondence of sine stimulation, and achieved the character of micro - positioning work piece table under the dynamic force. At last the reason for the large variety of the static and dynamic stiffness on the work piece table has been analyzed, and some improving methods are presented.

关 键 词：有限元分析 弹性铰链 预紧机构 导向机构 静态刚度 动态刚度 纳米级微进给平台 PZT驱动器 

分 类 号：TH16[机械工程—机械制造及自动化]