固体模块在真空粗抽控制电路中的应用  

Application of Solide State Modules in a Control Circuit for the Rough Pumping System

作　　者：俞鸣峰[1] 吴建强[1] 高宜海[1] 张生虎[1] 

机构地区：[1]中国科学院近代物理研究所,甘肃兰州730000

出　　处：《真空电子技术》2003年第1期45-47,共3页Vacuum Electronics

摘　　要：叙述了固体电子模块在真空粗抽泵、阀控制电路中的应用及其原理 ;A circuit which contains some solid state modules designed for controlling the operation of a rough pumping system in VIRGO and its working logic principle are explained.A kind of protective circuit which can change the locking state of a stepper bistable relay using a difference of continuance time between distinct devices in the transient process as break away is introduced.

关 键 词：固体模块 真空粗抽泵 阀控制电路 瞬态过程 锁定状态 

分 类 号：TN108[电子电信—物理电子学]