新型极化聚合物薄膜电光调制器研究  

An Electro-optic Modulator Utilizing Polar Polymer Film

作　　者：张大明[1] 揣晓红[2] 陈开鑫[2] 王菲[2] 衣茂斌[2] 许武[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所,吉林长春130022 [2]吉林大学集成光电子学国家重点联合实验室,吉林长春130023

出　　处：《发光学报》2003年第2期147-151,共5页Chinese Journal of Luminescence

基　　金：国家高技术研究发展计划(2001AA312160);国家重点基础研究发展规划(G2000036604)资助项目

摘　　要：用对硝基偶氮苯类为侧链的键合型聚合物,采用高温电晕极化的方法制作电光薄膜,设计并构造极化聚合物薄膜电光调制器。当通光方向和极化方向平行并且垂直于极化聚合物薄膜的表面时,利用法布里 帕罗(F P)腔中多光束干涉,可以把通过的光由位相调制转化为强度调制,有利于电光调制器的小型化和高速封装。用这种聚合物薄膜电光调制器测量了铟锡氧化物共面波导上的电信号,并对系统的工作原理进行了分析。实验结果表明,薄膜调制器具有线性电光效应;当F P腔的精细因子为20(对1 3μm的光),调制电场为1V/μm时,研制的极化聚合物电光调制器的调制深度可达到0 01%。The rapid increase of information technique requests the continuous increase of process speed and enlarged capacity for the communication devices, thus some t ra ditional communication technologies and devices could not fulfill the demands o f applications. Therefore, the research of low cost, large capacity and high spee d devices for the current and future information processing and transmitting are imminent. During the process of the research, polar polymer electrooptic modul ators have attracted many researchers because their particular properties such a s large electrooptic coefficient, low dielectric constant, low cost, simple fa bricating technologies and faster response. Many devices based on the polar poly mer are applied in the areas of the optical communications and the optical i nter connects of integrated circuits. Among them, electrooptic modulators are used not only to research the properties of the polymer materials, but also to achiev e modulation array, in addition, electrooptic film modulators are important co mponents in free space optical interconnection systems. Besides, the film modula tor could decrease device size and be benefit to high speed package.In this paper, the electrooptic modulator utilizing a polar polymer film wa s reported. The polymer was epoxypnitroanilinecinnamy. After spincoated onto the indiumtin oxide glass to form into optical quality films. The polymer was baked at 60℃ for 30min, and dried in a drier for 12h to remove residual so lvent. Then the film was corona polar at 90℃ for 30min with 10kV poling volta ge and 5μA poling current. After the film was cooled down to room temperature, an electrooptic film was formed with thickness about 2μm. The polar polymer fil m was sandwiched between two indiumtin oxide electrodes and placed in a Fabry Perot etalon. The FabryPerot cavity is utilized to convert the phase modulatio n to amplitude modulation by multiple reflection and interference properti

关 键 词：电光调制器 法布里—珀罗腔 电光薄膜 极化聚合物薄膜 高温电晕极化 

分 类 号：TN761[电子电信—电路与系统] O484.4[理学—固体物理]