KrF准分子激光精密加工K9光学玻璃的实验研究  

Experimental study on precision machining K9 glass by KrF excimer laser

作　　者：江超[1,2] 王又青[1] 

机构地区：[1]华中科技大学 [2]湖北师范学院物理系,湖北黄石435003

出　　处：《电加工与模具》2003年第2期33-35,共3页Electromachining & Mould

摘　　要：采用波长 2 4 8nm的KrF准分子激光器对K9光学玻璃的精密微细加工进行了研究 ,探讨了准分子激光与玻璃的相互作用机理。进行了表面切割和打孔实验 ,研究了激光加工的工艺参数及加工质量的变化规律 ,对加工后的工件表面形貌进行了分析。In this paper ,the study of precision micro-machining K9 glass tile with KrF(λ=248nm) excimer laser is carried out, the mechanism of the interaction between the excimer laser and the glass is discussed. The experiments of cutting and drilling on the glass are also finished. The processing parameters and quality of precision machining are studied too, analyzing surface topography of machined work-pieces.

关 键 词：准分子激光器 激光烧蚀 激光精密加工 激光切割 激光打孔 光学玻璃 

分 类 号：TQ171.6[化学工程—玻璃工业] TG665[化学工程—硅酸盐工业]