用熔融织构靶制备的YBa_2Cu_3O_(7-δ)超导薄膜的微观组织结构  

Microstructure of YBa_2 Cu_3O_(7-δ)Superconducting Films Pulsed Laser Ablated from a Melt-textured Target

作　　者：王天生[1] 田永君[1] 彭炜[2] 胡文斐[2] 李林[2] 

机构地区：[1]燕山大学,河北秦皇岛066004 [2]中国科学院物理研究所国家超导实验室,北京100080

出　　处：《稀有金属材料与工程》2003年第4期301-304,共4页Rare Metal Materials and Engineering

基　　金：国家自然科学基金资助(59832050)

摘　　要：用脉冲激光蒸发熔融织构靶材在SrTiO3(001)单晶基片上制备了YBa2Cu3O7-δ超导薄膜。用X-射线衍射仪、透射电镜和原子力显微镜分别对薄膜的微观结构和表面形貌进行了分析。结果表明,薄膜呈c轴取向,薄膜中产生了一定数量的颗粒状Y2O3杂相,且具有择优取向,而靶材中所含的Y2BaCuO8相却没有在薄膜中形成,沉积温度升高,有利于犤001犦取向的Y2O3的形成,但不利于犤111犦取向Y2O3的形成,与传统的粉末烧结靶相比,用熔融织构靶制备YBa2Cu3O7-δ薄膜可以明显抑制薄膜表面颗粒的形成。YBa 2 Cu 3 O 7-δ superconducting films were prepare d on SrTiO 3 (001)single crystal substrates by pulse l aser ablating melt-textured target.The microstructures and the surface morphology of the films were studied by X-ray diffractometry,tr ansmission electron microscopy and atomic force microscopy.The results showed that the YBa2Cu3O7-δsuperconducting films are c-axis oriented.Some Y2O3particles with certain preferred orientation,rather than Y2BaCuO 5 particles contained in the target,were formed in the films.As the deposition temperature in-crease,the formation of 001-oriented Y 2 O 3 particles can be promoted,and111-oriented Y 2 O 3 can be inhibited.Comparing to conven-tional powder-sintered target,using melt-textured target to prepare YBa 2 Cu 3 O 7-δ superconducting films can inhibit t he droplets formation on the films surface.

关 键 词：脉冲激光沉积 YBa2Cu307薄膜 Y203杂相 微观组织结构 超导薄膜 

分 类 号：O484.1[理学—固体物理]