惰性气体离子辅助产生Ca^+、He^+及其注入钛箔和纳米钛膜的微结构分析  

Production of Ca^+ and He^+ ions under the auxiliary of inert gas and microstructure analysis of the implanted Ti and Ti nano-film

作　　者：郑思孝[1] 罗顺忠[2] 廖小东[1] 龙兴贵[2] 彭述明[2] 王培禄[1] 刘仲阳[1] 刘宁[1] 

机构地区：[1]四川大学原子核科学技术研究所辐射物理及技术教育部重点实验室,成都610064 [2]中国工程物理研究院核物理与化学研究所,绵阳621900

出　　处：《核技术》2003年第5期341-345,共5页Nuclear Techniques

基　　金：国家自然科学基金和中国工程物理研究院联合基金(10276023) 资助

摘　　要：介绍了由弗里曼离子源在惰性气体辅助下产生Ca+、He+的研究及其分别注入钛箔和纳米钛膜的微结构分析。Ca+ 注入Ti箔样品的XPX分析表明:在1×1018/cm2注入剂量下,Ca的含量达到33﹪,注入Ca在钛表面主要形成CaTiO3、CaO和TiO2的化学结合的方式与钛基体连接;He+注入纳米钛样品的XRD的衍射谱在15—40°范围内明显分裂及变得较为尖锐,由谢乐公式计算出的纳米膜样品在(100)(101)晶面晶粒粒度大小分别为20.2nm和19.3nm,表明纳米钛膜注氦后仍保持纳米尺度。而AFM在微米视场下观察到纳米钛膜的表层粒子粒度虽有所长大,但在纳米视场却观察到大量的亚结构,结合AFM观察和XRD的分析结果证明在高剂量注入下,存在纳米钛膜表层粒子同时又被碎化成微晶使注氦纳米钛晶粒仍保持纳米尺度的重要现象。Production of Ca+ and He+ ions by Freeman source under the auxiliary of inert gas and the microstructure analysis of both implanted titanium foil and nano- Ti film were described. The XPX analysis for Ti film specimen implanted by Ca+ ion indicated that Ca content reached to 33 % at the implanted dose of 1×1018/cm2, and the titanium surface appeared mainly in the forms of CaTiO3, CaO and TiO2. It is clear that the implanted calcium linked up with titanium monomeric unit in the chemical conjugation. The XRD spectrum for titanium specimen implanted by He+ splits up obviously, and became more acute at the range of 15—40? The crystal sizes of the nano-film specimen on the crystal face of (100) and (101) calculated by Sherrer mode were 19.3nm and 20.2nm after implantation, still remaining nano-crystalline size. The intragranular crystal of nano-film surface reached a certain growth, and the growth of surface grain size of nano-titanium film was observed by AFM at m-visual field, but a large amount of substructure was still observed at nm-visual field. Hance based on AFM observation and XRD analysis, an important phenomenon was found that the surface granules of nano-titanium film existed after high dose implantation; and meanwhile they split up into micro-crystals remaining nano-crystalline gain size.

关 键 词：CA^+ He^+离子注入 纳米钛膜 微观结构 

分 类 号：O481[理学—固体物理]