热拉伸和化学腐蚀相结合制备弯曲光纤探针  

Fabrication of bend optical fibre probes by heated pulling combined with chemical ething

作　　者：徐凯[1] 潘石[1] 吴世法[1] 孙伟[1] 李银丽[1] 

机构地区：[1]大连理工大学物理系,大连116024

出　　处：《物理学报》2003年第5期1190-1195,共6页Acta Physica Sinica

基　　金：国家自然科学基金 (批准号 :60 0 0 70 11;30 2 70 367);国家科技部和中国分析测试协会仪器功能开发基金 (批准号 :GN 99 15 );教育部博士点基金 (批准号 :2 0 0 2 0 14 10 18)资助的课题~~

摘　　要：提出了原子力 光子扫描隧道显微镜 (AF PSTM)系统的关键部分———双功能弯曲光纤探针的制作方法 .采用热拉伸与动态、静态两步化学腐蚀相结合的方法制作出AF PSTM弯曲光纤探针 ,弯曲角度约为 15 0°,尖端曲率半径优于 10 0nm ,锥角范围为 60°— 90° .将这种双功能弯曲光纤探针应用在新研制的AF PSTM系统上 ,同时获得了样品的光学与形貌图像 。In this paper,a fabrication method for the bi-functional bend optical fiber probe which is the key element of atomic force/photon scanning tunnel microscope (AF/PSTM) system, is described. The heated pulling combined with dynamic/static two-steps chemical etching method is proposed and developed. Using this method, we have made the AF/PSTM bend optical fibre probe. The bend angle of the probe is about 150 degrees; the radius of curvature at the top end is better than 100nm; the cone angle varies from 60 to 90 degrees. The bi-functional bend optical fiber probe is used in our newly developed AF/PSTM system. The optical and topographic images are obtained simultaneously and the image separation is realized.

关 键 词：热拉伸 化学腐蚀 弯曲光纤探针 制备 原子力/光子扫描隧道显微镜 AF/PSTM系统 

分 类 号：TH742[机械工程—光学工程] TN253[机械工程—仪器科学与技术]