移相干涉术用于测量长度方法研究  

Research on the method to measure length by shift-phase interferometry

作　　者：苏俊宏[1] 

机构地区：[1]西安工业学院陕西省薄膜技术与光学检测重点实验室,陕西西安710032

出　　处：《西安工业学院学报》2003年第2期95-100,共6页Journal of Xi'an Institute of Technology

摘　　要：研究了应用移相干涉术测量新的1等量块的方法.对于干涉图像进行多幅图的采样,由移相法计算量块测量面和与其研合的辅助平晶表面的波面面形,尤其研究了在量块干涉图中有阶跃不连续的波面复原运算的原理与技术,得到一组表征它们表面的离散波差值,并给出量块工作面长度和长度变动量的测量结果.The method to measure the new first grade gauge block by phase-shift interferometry has been studied. Firstly, multi-frame interference patterns are captured by CCD, then the shape of the measured surface of the gauge and the assistant reference flat to be wrung are obtained by phase-shift arithmetic. The unwrapping wavefront principle and technology when there are step and discontinuity in the gauge interference patterns are studied. The discrete wave which is fitted to be a continous and smooth surface error is calculated. The paper discussed measurement of guage block length,and presented measurement result of working face length dynamic argument of guage block.

关 键 词：移相干涉术 长度测量 测量方法 干涉图像 量块 波面复原 离散波差值 工作面长度 长度变动量 

分 类 号：TH744.3[机械工程—光学工程]