化学溶液沉积法制备YBa_2Cu_3O_7超导薄膜  

Preparation of YBa_2Cu_3O_7 thin films by chemical solution deposition

作　　者：文自立[1] 曹光旱[1] 许祝安[1] 张年生[1] 沙键[1] 焦正宽[1] 

机构地区：[1]浙江大学物理系

出　　处：《浙江大学学报（理学版）》2003年第3期268-270,共3页Journal of Zhejiang University（Science Edition）

基　　金：国家"973"资助项目(NKBRSF-G1999064602);国家自然科学基金资助项目(10274070).

摘　　要：用钇、钡、铜的环烷酸盐溶液为原料,采用化学溶液沉积法在LaAlO3(001)衬底上制备了YBa2Cu3O7超导薄膜.X射线衍射分析表明薄膜主要沿[001]方向外延生长.原子力显微研究显示晶粒排列严密、整齐有序,表面也较为平整.电阻测量显示该薄膜的超导起始转变温度为87K.本方法有望应用于大面积高温超导薄膜及带材的制备.YBa2Cu3O7 thin film was prepared on a LaAlO3 (001) substrate by chemical solution deposition, using yttrium, barium, and copper naphthenates as starting material. X ray diffraction study indicates that the film mainly grows epitaxially along(001)direction. The atomic force microscopy experiment shows that the grains arrange tightly in order. The resistance measurement shows that the onset superconducting transition temperature of the asprepared film is 87 K. It is expected that the method can be applied for the fabrication of largearea high temperature superconducting films and tapes.

关 键 词：YBa2Cu3O7超导薄膜 化学溶液沉积法 制备方法 薄膜结构 超导起始转变温度 高温超导薄膜 

分 类 号：O511[理学—低温物理] O484.1[理学—物理]