光学式非接触厚度-微位移测量仪的研制  

Research of Optical Noncontact Thickness-displacement Meter

作　　者：陈阳[1] 王慕坤[1] 

机构地区：[1]哈尔滨理工大学测控技术与通信工程学院,黑龙江哈尔滨150080

出　　处：《哈尔滨理工大学学报》2003年第3期86-89,共4页Journal of Harbin University of Science and Technology

摘　　要：在激光三角测量法原理基础上,应用光学系统成像技术,利用光电位置传感器PSD获得象点移动量,并根据象点移动量建立与被测物厚度—微位移变化之间的数学模型,通过象点位置变化的计算,研制了光学或非接触厚度—微位移测量仪。实现了被测物厚度—微位移变化量的测量。该测量仪的量程为1000μm,分辨力小于0.2μm。Based on the triangular measuring principle of laser and applying the technology of light-image system with PSD (Position sensitive Detector) sensor, a mathematical model can be founded because of the relationship between the offset of light-point on PSD and the change of object thickness. According to this, the shift of object thickness can be measured through this analyses of displacement of light -point's position on PSD, and the reliability of this device can be tested with many practical specimens. The resolution of this meter is 0.2um and the range of measurement is 1 000 um.

关 键 词：厚度-微位移测量仪 激光三角测量法 光电位置传感器 数学模型 斜射法 直射法 光学系统成像技术 

分 类 号：TH82[机械工程—仪器科学与技术]