Monte Carlo模拟研究轰击诱发吉布斯偏析现象  

Monte Carlo Studies of Bombardment-Induced Gibssian Segregation Phenomena

作　　者：郑里平[1] 

机构地区：[1]中国科学院上海原子核研究所

出　　处：《上海大学学报（自然科学版）》2003年第3期252-258,共7页Journal of Shanghai University:Natural Science Edition

基　　金：国家自然科学基金 (1 96 750 6 1;1 98750 74)资助课题

摘　　要：低温时,合金溅射的轰击诱发吉布斯偏析(bombardment-inducedGibbsiansegregation)现象,是在1982年首次发现的.我们建立了包括质量效应、键合效应和轰击诱发吉布斯偏析效应的MonteCarlo(MC)模拟程序;并对轰击诱发吉布斯偏析效应的两大特征(第一是表面成分梯度特征,第二是表面成分梯度的中间性特征)作了研究.通过精确的定量计算得到了被轰击合金表面的成分梯度、溅射角分布和溅射产额具有中间性特征,并对其形成的原因作了理论的解释.In 1982, phenomena of bombardmentinduced Gibssian segregation(BIGS) during alloy sputtering at low temperature were found. By using Monte Carlo(MC) simulation programs including mass effects, surface binding energy effects and bombardmentinduced Gibssian segregation effects, two important characters of BIGS are studied. One is the characteristic of the surface composition graient of BIGS, and another is the intermediate characteristic of the surface composition gradient of BIGS. MC simulations show why a composition gradient of the segregation element is formed in the bombarded alloy surface, and why the surface composition gradient, the sputtering angular distribution and the sputtering yield have the intermediate characteristics.

关 键 词：合金溅射 轰击诱发吉布斯偏析 MONTE CARLO模拟 

分 类 号：O485[理学—固体物理] O552.2[理学—物理]