减少阴极弧金属等离子体源液滴的技术措施  

Technical Measures of Reducing Macropaticles in the Cathodic Arc Metal Plasma Source

作　　者：汤旭东 王小峰[2] 龙振湖[3] 

机构地区：[1]哈尔滨燃气化工总公司,黑龙江哈尔滨150076 [2]哈尔滨工业大学,黑龙江哈尔滨150001 [3]大连理工大学,辽宁大连116024

出　　处：《机械工程师》2003年第6期39-41,共3页Mechanical Engineer

摘　　要：液滴的存在并伴随着金属等离子体输运是阴极弧金属等离子体源的主要特性之一,液滴问题的严重性常常影响着阴极弧金属等离子体源广泛应用的可能性。文中针对如何减少液滴,提出了在阴极弧金属等离子体源物理和结构设计上采取的适当技术措施;然后在金属等离子体输运过程中,用正偏压的45°弯管(短磁导管)进行电磁过渡,使液滴减少到最少,使离子得到高效传输,最大限度地减少了液滴对被沉积薄膜性能的影响。One main feature of the cathodic are metal plasma source is existing macroparticles which are transported with metal plasma,and the widely application possibility of the cathodic arc metal plasma source is often affected by the serious macroparticles problem.In this paper,in order to reduce macroparticles substantially,put for-ward a series of technical measures of improving physical and structural designs of the cathodic are metal plasma source;then use a45°curved tube(short magnetic filter)with positive bias voltage in the metal plas-ma transportation process to carry on electric,and magnetic filter further to reduce macroparticles,raise ion transportation efficiency,and decrease the effect of macroparticles on properties of deposited thin films as much as possible.

关 键 词：阴极弧金属等离子体源 液滴(宏观粒子) 电磁过滤 

分 类 号：TG174.444[金属学及工艺—金属表面处理]