原子态化学吸附气体的低能离子诱导脱附截面的蒙特卡罗模拟  

MONTE-CARLO SIMULATION OF ATOM-STATE CHEMISORBED GAS DESORPTION CROSS SECTION BY LOW-ENERGY IONS INDUCTION

作　　者：陈一平[1] 于书永[1] 

机构地区：[1]中国科学院等离子体物理研究所,合肥230031

出　　处：《计算物理》1992年第1期87-92,共6页Chinese Journal of Computational Physics

摘　　要：本文根据winters & Sigmund离子诱导脱附的碰撞理论,用蒙特卡罗方法模拟了以原子态化学吸附于固体表面上的气体在低能离子轰击下所发生的脱附现象。模拟中得出了离子诱导的气体原子产额Y与气体原子在固体表面上的覆盖度θ的线性关系,并在此基础上,迅速获得了离子诱导脱附截面σ。This paper simulates desorption phenomenon of atom-state chemisorbed gas on solid suface by low-energy ions bombardment based on collision theory of winters & sigmund. In the simulation, line relevance between induced gas atom gields Y by ions and coverge density θ of gas atom on solid suface is obtained, on the basis of line relevance, ion induction desorption cross section σ is obtained rapidly.

关 键 词：化学吸附 脱附截面 模拟 离子诱导 

分 类 号：O647.32[理学—物理化学]