环境扫描电子显微镜的成像特点  

Characteristic of imaging in environmental scanning elecrron microscope

作　　者：郑春明[1] 周巧琴[1] 蔡传荣[1] 

机构地区：[1]福州大学中心实验室,福建福州350002

出　　处：《福建分析测试》2003年第1期1719-1721,共3页Fujian Analysis & Testing

摘　　要：环境扫描电子显微镜(ESEM)中所指的环境并非真正意义上的大气环境(760 Torr),与传统扫描电子显微镜(SEM)样品室高真空度相比,ESEM样品室的真空度可以很低(约达20 Torr)。ESEM是在传统的SEM样品室中多一个GSED探头,因此,它在传统的SEM基础上增添了新的功能。其主要的特点是,可以观察含适量水分的样品和非导体材料样品,比如植物的叶片、动物中的昆虫、作物的籽粒、含结晶水的固体材料等。The environment of environmental scanning electron microscope does not really mean the atmosphere. Compared with conventional scanning electron microscope, the vacuum in ESEM chamber is rather low (about 20 Torr ). There is a gaseous secondary electron detector (GSED) in the chamber in ESEM' which offers new functions. Therefore, it can be used to observe the moisture bearing specimens and the insulation specimens, such as leaves, insects grains and moisture-beating solids.

关 键 词：环境扫描电子显微镜 气体二次电子探头 大气环境 真空度 成像特点 

分 类 号：TN16[电子电信—物理电子学] TH742[机械工程—光学工程]