热阴极与冷阴极电离规计量学特性比较研究  

COMPARISON OF SOME METROLOGICAL CHARACTERISTICS OF HOT AND COLD CATHODE IONIZATION GAUGES

作　　者：李得天[1] 

机构地区：[1]兰州物理研究所,甘肃兰州730000

出　　处：《真空与低温》2003年第2期85-92,123,共9页Vacuum and Cryogenics

摘　　要：介绍了3个热阴极电离规和2个反磁控型冷阴极电离规的计量学特性实验研究结果。实验设备是一台高真空基础标准,实验范围为10-7～10-3Pa,实验气体为N2、Ar、He和H2。在连续72h观测中,热阴极电离规在N2、Ar和He中的稳定性优于反磁控规,但在H2中则所有规的稳定性相似。在6个月的重复校准中,所有规在N2、Ar和He中的长期稳定性相似,但在H2中反磁控规的长期稳定性优于热阴极电离规。对于不同的气体,反磁控规的非连续性出现在不同的压力点。在很宽的压力范围内,热阴极电离规的相对灵敏度变化较小,但反磁控规的相对灵敏度随压力变化较大。反磁控规的放电时间随压力、气体和真空系统中电离源的不同而变化。反磁控规的出气率比热阴极电离规小得多,而抽速与一个具有10mA发射电流的热阴极电离规相当。对一些影响实验规计量学特性的原因进行了讨论。Three hot cathode gauges and two\|inverted magnetrons were tested against a primary high\|vacuum standard over the range 10-7 to 10-3 Pa with gases of N\-2, Ar, He and H\-2. In a continuous observation for 72 h, hot cathode gauges had better stabilities than inverted magnetrons in N\-2, Ar and He, but all gauges behaved similarly in H\-2. Repeated calibrations over a period of about 6 months showed that all gauges had similar stabilities in N\-2, Ar and He. For H\-2 however, the stability of the inverted magnetrons was better than that of the hot cathode gauges. For different gases, the discontinuities of the inverted magnetrons occurred at different pressures. For the hot cathode gauges, the changes in relative sensitivities with pressure were small in a wide pressure range. Nevertheless, for the inverted magnetron gauges the changes were strongly pressure dependent. The starting times of the inverted magnetrons varied with pressures, gases and ionizations sources in the system. For the inverted magnetrons, the outgassing rates were much lower than that of the hot cathode gauges. However, their pumping speeds were similar to that of a hot cathode gauge with an emission current of 10 mA. Some reasons, which influenced the metrological characteristics of the gauges tested, are also discussed.\;

关 键 词：热阴极 冷阴极 电离规 计量学特性 高真空基础标准 稳定性 反磁控规 

分 类 号：O462.1[理学—电子物理学]