亚波长周期结构抗反射介质光栅的衍射特性  

Diffractive Characteristics of Antireflective Dielectric Gratings with Subwavelength Periodic Structure

作　　者：曹召良[1] 卢振武[1] 李凤有[1] 任智斌[1] 刘玉玲[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,长春130022

出　　处：《光电子．激光》2003年第7期694-697,共4页Journal of Optoelectronics·Laser

基　　金：中国科学院创新基金资助项目(2002LQ.04)

摘　　要：用严格耦合波理论(RCWA)计算了当折射率取一系列离散值时的二维亚波长周期结构介质光栅出现一级衍射透射波的周期值,进而利用最小二乘法拟合出临界周期点随折射率的变化规律;利用一维单台阶和多台阶光栅在TE、TM偏振状态以及二维单台阶圆柱状光栅和二维金字塔结构多台阶光栅进行验证,发现它们同样满足临界周期点的变化规律。结果证明,对于任意面形的亚波长周期结构介质光栅的一级衍射效率都有这一规律。Rigorous coupled wave analysis was used to calculate the value of two-dimensional square-pillar subwavelength gratings maximum period that allows only propagation of the zeroth diffraction order (the maximum period is also called the critical periodic point). Assuming the surrounding medium is air, some different refractive indexes of the grating material are chosen to calculate the critical periodic point. It was shown that one-dimensional and two-dimensional gratings have the same results. The results are very useful for designing and fabricating the antireflective subwavelength gratings. It can be used to avoid the failure of fabricating grating and complicated calculation.

关 键 词：耦合波理论 RCWA 折射率 亚波长周期结构 介质光栅 衍射特性 临界周期点 最小二乘法拟合 

分 类 号：TN253[电子电信—物理电子学]