带膜微通道板的工艺和特性研究  

Technology and Performance of Filmed Microchannel Plate

作　　者：闫金良 

机构地区：[1]烟台师范学院物理系,山东烟台264025

出　　处：《红外技术》2003年第4期84-87,共4页Infrared Technology

摘　　要：微通道板 (MCP)电子透射膜是决定Ⅲ代微光像管稳定性和可靠性的主要因素。采用有机衬底掩膜技术和冷基底溅射相结合的方法在MCP输入面制备非晶态Al2 O3 电子透射膜 ,测量了带膜MCP紫外光辐照清洗前后的电学特性。讨论在多孔MCP输入面形成连续电子透射膜与气体辉光放电的关系 ,工艺失败对MCP的危害性。Stability and reliability of third generation image tubes depend on electron transmission film at the input of MCP. Amorphous Al 2O 3 electron transmission film at the input of MCPs have been developed by using a new method combining the organic substrate technique with the cold basement sputtering. Some electric performance of filmed MCPs are measured before and after ultraviolet radiation cleaning. The relation between continuous film forming at the input of porous MCP and glow discharge of the gases is discussed, and the harm of failure processing to MCP is analyzed.

关 键 词：微通道板 MCP 电子透射膜 气体辉光放电 微光像管 

分 类 号：TN105.1[电子电信—物理电子学]