红外光学零件预处理工艺研究  

Study of IR Optical Components Pretreatment

作　　者：陈光文[1] 徐冬梅[1] 袁晓鹏[1] 王海宁[1] 赵鲁生[1] 王春育[1] 

机构地区：[1]昆明物理研究所,云南昆明650223

出　　处：《红外技术》2003年第4期73-76,共4页Infrared Technology

摘　　要：红外光学系统通常需用镀膜的方法来增强光学系统的透过性能。光学零件 (基底 )表面镀前的清洁状态直接影响到膜层质量 ,诸如附着力、均匀性、色散、透过率等 ,进而影响到光学系统的性能。介绍了基底表面清洁度及其评估和检验方法 ,对光学零件表面污垢类型及镀前清洁 (预处理 )方法进行了评述。针对实验阶段的预处理工艺远远无法足日益强增的军用和民用红外产品需求的问题 ,通过分析比较 ,认为干冰喷射预处理 +等离子体清洁的组合可以成为一种可以满足红外光学零件批量生产要求的理想的预处理工艺。Coatings is necessary for optical components in almost all infrared systems to improve their transmittance in required waveband and their environmental endurance. The surface cleanliness of optical components before coating will directly affect the films characteristics,such as adherence,uniformity,optical scatter,transmittance etc,thus degrade the performance of the IR system. In this article we discussed the types of dirt on the optical surface and introduced and studied several corresponding cleaning methods. An ideal pretreatment jet cleaning plus plasma cleaning can get promising pretreatment cleanliness of optical surface and its assessment methods were introduced.

关 键 词：红外光学零件 预处理 清洁度 干冰喷射清洗 等离子体清洁 

分 类 号：TN214[电子电信—物理电子学]