半导体应变计的温度误差及其补偿  

The Temperature Error of Semiconductor Strain Sensor and Compensation

作　　者：孟凡文[1] 梁海霞[1] 

机构地区：[1]济宁职业技术学院,山东济宁272037

出　　处：《机电工程技术》2003年第4期30-32,共3页Mechanical & Electrical Engineering Technology

摘　　要：半导体式应变计的灵敏度很高,但它的电阻温度系数大,灵敏度也随温度变化而变化,易产生热零点漂移和热灵敏度漂移,文中分析了半导体式应变计温度误差产生的原因,提出了减小热零点漂移和热灵敏度漂移的几种方法,有效地实现了温度补偿。Though semiconductor strain sensor has very high sensitivity,it also has high coefficient of resistor temperature,and the sensitivity of the sensor changes with the change of the temperature,so it's easy to produce zero position temperature drift and sensitivity temperature drift.The paper analyses the producing reason of temperature error,and gives some waysto eliminate sensitivity temperature drift and zero position temperature drift to compensate temperature error.

关 键 词：半导体应变计 温度误差 压阻效应 热零点漂移 热灵敏度漂移 温度补偿 

分 类 号：TN37[电子电信—物理电子学]