利用光差分技术检测激光激发声表面波定征薄膜材料  

Characterizing of thin film materials by optical difference detection of laser generated SAW

作　　者：徐晓东[1] 张淑仪[1] 张飞飞[1] 刘天柱[1] K.Wasa 

机构地区：[1]南京大学声学研究所近代声学国家重点实验室,南京210093

出　　处：《声学学报》2003年第3期201-206,共6页Acta Acustica

摘　　要：利用激光激发声表面波及改进的光差分检测技术,研究沉积在基片表面的薄膜样品的特性和参量。根据实验获得的声色散曲线和基片已知参数,结合层状媒质中声表面波传播理论,拟合得到薄膜材料的弹性模量、密度和厚度等物理量。结合扫描电子显微镜和X光衍射结果分析,并与文献值比较,表明所采用的技术是定征薄膜材料的弹性模量和力学参量的有效方法。A laser generation and modified optical difference detection method of SAW for studying the characters of thin films deposited on substrates is introduced. Based on the acoustical dispersion relations acquired from the experiments and the parameters of the substrates, the elastic constants, density and thickness of the film can be simulated by using the theory of elastic wave propagation in thin layers. Three films, Fe, Au and Si films, deposited on glass plates have been studied and the related parameters have been evaluated. In order to analyze the simulated results, the scanning electronic microscope (SEM) and X-ray diffraction (XRD) analyses, the results of the films have also been obtained. Comparing with the published values and combining with the SEM and XRD analyses, show that the method is a validity technology for evaluating the mechanical and elastic characters of thin film materials.

关 键 词：光差分技术 激光激发 声表面波 薄膜材料 弹性模量 密度 厚度 力学参量 

分 类 号：O484.5[理学—固体物理] TB383[理学—物理]