微流控芯片中超微电极的制作及其在芯片-电化学检测中的应用  

Fabrication of the Microfluidic Chips with Integrated Ultra-micro Electrodes and Its Application in On-chip Electrochemical Detection

作　　者：金亚[1] 罗国安[1] 

机构地区：[1]清华大学化学系,北京100084

出　　处：《高等学校化学学报》2003年第7期1180-1184,共5页Chemical Journal of Chinese Universities

基　　金：国家自然科学基金重大项目 (批准号 :2 0 2 9930 30 )资助

摘　　要：设计并制作了集成有超微电极的玻璃微流控芯片 .在电化学检测芯片 1 (EC-1 )中 ,以光刻方法制作1 3μm宽的 Pt超微电极 ,距分离管道末端 30μm,优化电极体系和分离电压 ,检测了电泳分离的神经递质 .在电化学检测芯片 2 (EC-2 )中 ,制作 7μm宽的超微电极 ,在其上游集成城墙式的膜结构 ,进一步腐蚀后的膜厚度为 1 0μm,具有良好的导电性和散热性能 ,成功地将高压电场截至在超微电极之前 ,具有进一步应用于电化学检测的能力 .Microfluidic glass chips with integrated ultra-micro electrodes were fabricated. In pattern EC-1, a 13-μm-wide platinum electrode was located photolithographically at the end of separation channel and extended 30 μm into the 6 mm wide detection reservoir. The electrode system and separation voltage were optimized, and neurotransmitters were detected after electrophoretic separation. In pattern EC-2, a 7-μm-wide platinum electrode with a battlement-like membrane structure were integrated in the chips. With post-etching procedure, the membrane width was reduced to 10 μm. With good electric conductivity and heat dissipation capability, the porous membrane successfully shields the high electric field before the ultra-micro electrode, which shows great possibility to apply in the on-chip electrochemical detection.

关 键 词：微流控芯片 超微电极 制作 电化学检测 应用 多孔膜 微全分析系统 

分 类 号：O657.15[理学—分析化学]