可控数目本征结的制备  

FABRICATION OF INTRINSIC JOSEPHSON JUNCTIONS WITH CONTROLLABLE NUMBER OF JUNCTIONS

作　　者：尤立星[1] 吴培亨[1] 吉争鸣[1] 范世雄[1] 许伟伟[1] 蔡卫星[1] 康琳[1] C. T. Lin 

机构地区：[1]南京大学超导电子学研究所,南京210093 [2]Max-Planck-Institut für Festkrperforschung

出　　处：《低温物理学报》2003年第3期198-201,共4页Low Temperature Physical Letters

基　　金：国家重点基础研究发展规划项目 (G19990 6 4 6 );国家高技术研究发展计划资助的课题~~

摘　　要：基于传统的mesa结构制备工艺 ,我们通过精确控制实验参数的手段 ,在Bi2 Sr2 CaCu2 O8+x单晶上实现了仅含有少数几个结的本征结的制备工艺 ,结的临界电流具有很好的一致性 .结的数目最少达到 2个 (包括表面结) ;结数目控制误差为±1个 .With low etching rates of Argon ion milling, conventional fabrication process is improved by precisely measuring or controlling the parameters of the fabrication, which include the thickness of silver layer and the time and rates of etching process. We obtained intrinsic Josephson junctions of mesa structure, the number of junctions in which is controllable with the error within ±1. The minimum number we obtained is only 2 with the consideration of the existence of the surface junction. The critical current of each junction in the stack is quite consistent.

关 键 词：高温超导氧化物 可控数目本征结 制备工艺 约瑟夫逊结 超导电性 

分 类 号：O511.9[理学—低温物理]