涡轮分子增压泵的研究现状与进展  

Advance research and developments on theory for a spiral-grooved turbo booster pump

作　　者：于治明 刘波[1] 巴德纯 杨乃恒 

机构地区：[1]东北大学

出　　处：《真空》2003年第4期32-38,共7页Vacuum

摘　　要：综述了涡轮分子增压泵的研究现状与进展。涡轮分子增压泵是一种动量传输型真空泵 ,它的出口压力范围可达 10 0 0 Pa,通过计算流体动力学方法 (CFD法 )和直接模拟蒙特卡罗法 (DSMC)可以模拟计算抽气通道内气体的流动 ,这两种互补的方法可以研究从粘滞流到分子流的全部抽速曲线 ,从而指导新型涡轮分子增压泵的设计。The present situation and advance in development of a spiral grooved turbo booster pump are reviewed. It is a kind of momentum transfer vacuum pump, and is capable of operation in a discharge pressure range up to the pressure of 1000 Pa. The flow inside pumping channel can be simulated by both of the computational fluid dynamics method and the direct simulation Monte Carlo method. These two complementary approaches are used to investigate the whole pumping speed curve from the viscous to the molecular flow range. And it can be guided to design of new turbo booster pump.

关 键 词：涡轮分子增压泵 真空泵 流体动力学 粘滞流 分子流 抽速曲线 

分 类 号：TB752.27[一般工业技术—真空技术]