电子诱导脱附研究钨表面O_2对N_2的置换吸附  

Study of Displacement Adsorption of N_2 by O_2 on Surface of Polycrysta lline Wvia Threshold Energy of Electron-stimulated Desorption

作　　者：张彤[1] 吴强[2] 胡安[3] 毛福明[1] 杨学谦[1] 

机构地区：[1]东南大学电子工程系,南京210096 [2]南京师范大学数学与计算机科学学院,南京210097 [3]南京大学固体微结构物理国家重点实验室,南京210093

出　　处：《物理化学学报》2003年第8期686-688,共3页Acta Physico-Chimica Sinica

基　　金：国家杰出青年科学基金(60125513);南京大学博士后科研基金(0204003047)~~

摘　　要：实验测量了室温高真空条件下,多晶W表面O2和N2的电子诱导脱附(ESD)阈值能量.O2-W吸附对的ESD能量约为15.5eV,N2-W吸附对的ESD能量约为13.8eV.实验结果具有良好的可重复性.利用ESD阈值能量研究了多晶W表面O2对N2的置换吸附过程,表明在一定的时间间隔内,O2可以置换吸附在多晶W表面的N2,且该过程不可逆.对实验结果进行了分析.The threshold energies of electron-stimulated desorption of N-2 and O-2 from polycrystalline W in vacuum (1x10(-3) Pa) at T=300 K are measured. For O-2-W couple, the threshold energy is about 15.5 eV; For N-2-W couple, the threshold energy is about 13.8 eV. The displacement adsorption of N-2 by O-2 from the surface of polycrystalline W is studied using the measured threshold energy. The result shows that within a given time interval, N-2 could be displaced by O-2 on the surface of W, but the opposite process could not occur.

关 键 词：电子诱导脱附 钨表面 O2 N2 置换吸附 阈值能量 信号调制法 表面化学 

分 类 号：O647.3[理学—物理化学]