CMOS集成二维风速和风向传感器的研制  

Fabrication of a CMOS Two-dimensional Integrated Wind Speed and Wind Direction Sensor

作　　者：张昭勇[1] 秦明[1] 张中平[1] 黄庆安[1] 

机构地区：[1]东南大学MEMS教育部重点实验室,南京210096

出　　处：《仪器仪表学报》2003年第4期340-342,347,共4页Chinese Journal of Scientific Instrument

摘　　要：提出了一种新型结构的二维风向和风速传感器 ,其芯片上集成有运算放大电路。它主要由位于绝缘薄膜上的热敏感元件和加热电阻所组成 ,其中热敏感元件由两组互相垂直且分别对称放置的铝 /多晶硅型热电堆所构成 ,加热电阻位于热敏感元件的中间。具体阐述了此传感器的工作原理、结构尺寸和制备工艺 。A novel integrated two dimensional wind speed and wind direction sensor with on chip pre amplifying circuits is introduced.The sensor consists of thermal sensing elements and heating resistors.The outside of heating resistors are thermal sensing elements formed by two pairs of aluminum/p type polysilicon thermopiles, which situated symmetrically and perpendicularly to each other. The operation principle, preparation processes and geometry design are investigated. The picture of CMOS integrated die and measurement results of the sensor are finally given.

关 键 词：CMOS集成传感器 风速 风向 研制 运算放大电路 热敏感元件 加热电阻 EDP 

分 类 号：TH765.4[机械工程—仪器科学与技术] TP212[机械工程—精密仪器及机械]