多孔硅湿度传感器研究进展  

Development of porous silicon humidity sensor

作　　者：许媛媛[1] 何金田[1] 李新建[1] 陈渝仁[1] 

机构地区：[1]郑州大学物理工程学院,河南郑州450052

出　　处：《传感器技术》2003年第8期5-8,共4页Journal of Transducer Technology

摘　　要：综述了湿度传感器的研究现状。分析了多孔硅湿度传感器的感湿机理,介绍了几种多孔硅湿度传感器的制作工艺及结构,并讨论了它们的优缺点。最后,对多孔硅湿度传感器的应用前景作了展望。Existing state of the recent research of humidity sensors is summarized. The humidity sensitive mechanism of porous silicon humidity sensor is analysed. Several manufacture techniques and structures of porous silicon humidity sensor are introduced, then merits and demerits of them are discussed. Finally,prospects of (future) applications of porous silicon humidity sensor are presented.

关 键 词：多孔硅 湿度传感器 湿敏元件 制作工艺 感湿机理 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]