串联弯曲臂压电微电机驱动机理分析及实验研究  

Mechanism Analysis and Experimental Research of Piezoelectric Micromotor with Series Bending Arms

作　　者：佟建华[1] 邵培革[1] 王立鼎[1] 刘冲[1] 

机构地区：[1]大连理工大学机械工程学院,辽宁省大连市116023

出　　处：《中国机械工程》2003年第18期1600-1602,共3页China Mechanical Engineering

基　　金：国家自然科学基金资助项目(59875009)

摘　　要：把两片压电双晶片串联在一起,构成串联弯曲臂。一端固定,另一端自由时,在相位差为π/2的一定频率方波信号的驱动下,弯曲臂的自由端将形成类似椭圆的运动轨迹。以串联弯曲臂为驱动元件,可用来驱动端面与其相接触的转子转动,构成串联弯曲臂式压电微电机。对串联弯曲臂的驱动机理进行了分析,在新的微小尺寸驱动机理研究的椭圆运动的基础上,研制了直径为5 mm的串联弯曲臂压电微电机样机,对样机的性能参数进行了测试,转速可达325 r/min,转矩可以达到36.5μΝ·m。Series bending arms are composed of twopiezoelectric bimorphs, one end of which is fixed and theother end is free, driven by two signals of biased bar withphase difference of π/2, the free end of a cantilever armwill move along an elliptic orbit. When the cantilever isused to drive a cylinder rotator, of which the end surfacecontacts the free end of the cantilever, the rotator willrotate. The driving mechanism was analyzed and a newdriving theory was brought up. We designed a new mi-cormotor model, which has a diameter of 5mm,and test-ed its movement parameters. The rotational speed is upto 325 r/min and the starting torque is about 36. 5 N.μm.

关 键 词：串联弯曲臂 压电微电机 机理 实验 

分 类 号：TM384[电气工程—电机] TH703.8[机械工程—仪器科学与技术]