硅微机械谐振式陀螺仪  

Silicon Micromechanical Resonant Gyroscope

作　　者：朱一纶[1] 王寿荣[1] 裘安萍[1] 

机构地区：[1]东南大学仪器科学与工程系,江苏南京210096

出　　处：《中国惯性技术学报》2003年第4期45-48,54,共5页Journal of Chinese Inertial Technology

摘　　要：介绍了硅微机械谐振式陀螺仪的工作原理,给出了硅微机械谐振式陀螺仪的动力学方程详尽推导。针对此方程进行仿真研究,对结构设计参数进行了估计。研究表明,硅微机械谐振式陀螺仪是一种很有发展前途的新型陀螺仪。The operation principle of an integrated micromechanical vibratory rate gyroscope was described based on resonant sensing of the Coriolis force. The structure of gyroscope and doubled end tuning fork (DETF) were introduced, the equations on gyroscope and DETF were discussed in detail, and the ranges of designing parameters are presented. It is showed that the new silicon micromechanical resonant output gyroscope will be widely used in the future.

关 键 词：硅微机械谐振式陀螺仪 工作原理 动力学方程 仿真 结构设计 参数估计 

分 类 号：O318[理学—一般力学与力学基础] V241.554[理学—力学]