含氟聚酰亚胺高分子光波导工艺研究  

Study on the technics of fluorinated polyimide waveguide

作　　者：梁东波[1] 陈抱雪[1] 袁一方[1] 彭银和 赖龙斌 矶守[3] 

机构地区：[1]上海理工大学光学与电子信息工程学院,上海200093 [2]霓塔光电器件上海有限公司,上海200233 [3]日本东京农工大学应用化学系

出　　处：《上海理工大学学报》2003年第3期230-233,共4页Journal of University of Shanghai For Science and Technology

摘　　要：对光通信用含氟聚酰亚胺高分子聚合物材料的特性进行了讨论,报告了材料制备、膜厚控制、折射率控制以及光波导制备技术等方面的实验结果。实测了含氟聚酰亚胺薄膜的温度特性和色散特性,并给出了测量方法和测量结果。The characteristics of fluorinated polyimide used in optical fiber communication are discussed. The experiment results reguarding material preparation, film thickness control, refractive index control and optical waveguide facture technics are reported. The dependence of refractive index on temperature and dispersion characteristic of the fluorinated polyimide film are gotten, and the measuring method and the measuring results are also reported.

关 键 词：高分子光波导 含氟聚酰亚胺 旋涂法 棱镜耦合 

分 类 号：TN252[电子电信—物理电子学]