真空计量的若干进展  

SOME DEVELOPMENTS OF VACUUM METROLOGY

作　　者：李得天[1] 

机构地区：[1]兰州物理研究所,甘肃兰州730000

出　　处：《真空与低温》2003年第3期125-133,174,共10页Vacuum and Cryogenics

摘　　要：真空计量学已发展成为计量学的一个新的独立分支,其研究内容已从传统的全压力测量与校准扩展到分压力测量与校准、气体微流量(漏率)测量与校准。描述了这3个方面的最新进展,从中可看出真空计量学的现状与发展趋势。Vacuum metrology has been developed to be a new branch of metrology, whose concerned fields have been extended from the traditional total pressure measurement and calibration to the partial pressure measurement and calibration, and the gas micro-flow (leak rate) measurement and calibration. The latest developments of the fields are described, from which the current status and developing trend of vacuum metrology can be found.

关 键 词：真空计量学 全压力测量 分压力测量 校准 气体微流量测量 

分 类 号：TB9[一般工业技术—计量学] TB79[机械工程—测试计量技术及仪器]