相位检测法定镜自适应校正技术  

Adaptive alignment of fixed mirror by phase detection

作　　者：于立民[1] 代作晓[1] 王模昌[1] 施志华[1] 

机构地区：[1]中国科学院上海技术物理研究所,上海200083

出　　处：《光学精密工程》2003年第5期448-452,共5页Optics and Precision Engineering

摘　　要：为保持傅里叶变换光谱仪在动镜运动和外界震动等恶劣条件下动镜和定镜间的准直性,采用了相位检测法检测准直性误差的定镜自适应校正技术。介绍了相位检测法的基本原理和实现自适应校正的途径以及自适应校正系统的基本结构。采用高速压电倾斜镜作为驱动补偿元件,分析了相位检测精度对校正精度的影响。实验结果表明,采用自适应校正后系统干涉效率明显提高。In order to keep the dynamic alignment Fourier transform spectrometer (FTS) between the moving mirror and the fixed mirror while the mirrors are moving and the temperature is changing, a phase detecting method is proposed for magnitude and tilt direction. The structure of dynamic alignment system and the basic principle of the phase detection are discussed. Fast steering mirror is adopted in the self-alignment system. The features and structure of the fast steering mirror are detailed. Alignment results show that dynamic alignment has obvious effects on performance.

关 键 词：相位检测 自适应校正 准直性 高速压电倾斜镜 傅里叶变换光谱仪 

分 类 号：TH744.1[机械工程—光学工程]