片式电阻激光调阻机检测系统的设计  

Measurement system design of laser trimmer for chip resistor

作　　者：赵新[1] 姚建铨[1] 杨洗陈[2] 

机构地区：[1]天津大学精密仪器与光电子工程学院,天津300072 [2]天津工业大学激光技术研究所,天津300160

出　　处：《天津工业大学学报》2003年第5期46-48,共3页Journal of Tiangong University

摘　　要：在激光调阻机自动调阻过程中,需要对被调电阻进行实时在线精确测量,以控制调阻进程.传统的伏安法测量电阻,虽然可以进行精密测量,但不适合在线动态测量.本文将微处理机技术应用于有源电桥的测量,利用伏安法测量电阻的灵活性,配以高精度的精密运算放大器,构成高精密有源数字电桥,达到了工程应用要求.In the process of laser trimming, it is required to measure the resistors accurately on line and in real time, then to realize automatic control of the process. The conventional method to measure resistor by voltagecurrent is not suitable for the dynamic measurement on line, although its accuracy is satisfied. A new technique is presented, which applies micro processor to active electric bridge, combines the flexibility of voltagecurrent method and the precision of operation amplifier. Therefore, an activedigital bridge with high precision is designed, which can meet the demand of engineering.

关 键 词：激光调阻 有源电桥 在线测量 

分 类 号：TM934[电气工程—电力电子与电力传动] TG156.99[金属学及工艺—热处理]