钼钨纳米合金膜的制备及其微结构研究  

The Studies on the Preparation and the Microstructure of MoW Nano-structure Alloy Film

作　　者：章娴君[1] 郑慧雯[1] 王显祥[1] 

机构地区：[1]西南师范大学化学化工学院,重庆400715

出　　处：《西南师范大学学报（自然科学版）》2003年第5期762-765,共4页Journal of Southwest China Normal University(Natural Science Edition)

基　　金：重庆市科委攻关项目资助(99-5663).

摘　　要：利用羰基金属气相沉积方法,在Al2O3陶瓷基片上,以Mo(CO)6+W(CO)6为源,制备了MoW纳米合金晶膜.采用XRD和SEM技术,并与相同条件制备的Mo膜比较,研究了MoW合金晶膜的微结构.结果表明:该法制备的薄膜是以纳米粒子状态存在、具有超微结构的多晶膜材料.The MoW alloy film with nano-structure has been prepared on Al_2O_3 ceramic substrate using Metal Organic Chemical Vapor Deposition of Mo(CO)_6 and W(CO)_6. The microstructure of MoW alloy film has been investigated by XRD and SEM, and compared with molybdenum film at the same conditions. It is showed that the alloy film is a polycrystall film with nanostructure.

关 键 词：钼钨纳米合金膜 制备方法 微结构 羰基金属气相沉积方法 纳米结构 多晶膜材料 

分 类 号：O484.1[理学—固体物理] TB383[理学—物理]