纳米晶粒钛膜中氦注入的剂量保持和释放规律  

Preservation and Release Dose of Helium Implanted in Nanocrystal Titanium Film

作　　者：龙兴贵[1] 郑思孝[2] 罗顺忠[1] 刘仲阳[2] 王培录[2] 彭述明[1] 廖小东[2] 刘宁[2] 

机构地区：[1]中国工程物理研究院核物理与化学研究所,四川绵阳621900 [2]四川大学原子核科学技术研究所辐射物理及技术教育部重点实验室,四川成都610064

出　　处：《原子能科学技术》2003年第5期456-460,共5页Atomic Energy Science and Technology

基　　金：国家自然科学基金重点项目资助课题(50131050)

摘　　要：在室温～400℃范围内,用卢瑟福质子背散射技术测量了100keV、注入剂量2 2×1018cm-2的纳米晶粒钛膜中氦的浓度分布、不同温度下的剂量保持及其浓度释放。室温下经210d后,氦在该纳米晶粒钛膜中的剂量保持达68%,其He Ti原子比为52 6%;100℃下氦的保持剂量为室温下的89 6%,此时的He Ti原子比为44%;400℃下的保持剂量为室温下的32 6%,He Ti原子比为17 1%。同时观察到了氦的释放随温度上升呈现波浪式的变化特点。从能量稳定性观点初步探讨了纳米晶粒钛膜有效保持氦的可能机制。Helium concentration profile, preservation dose and release rate from a nanocrystal titanium film implanted with helium at an energy of 100 keV and dose of 22×1018 cm-2 are measured by proton Rutherford backscattering technique in a range from room temperature to 400 ℃. The implanted helium may be stably preserved up to the 68 percent after keeping a long time of 210 d in the nanocrystal titanium film at the room temperature environment, and the HeTi atomic ratio reaches to 526%. When the temperature of specimen increases to 100 ℃, the helium concentration can be preserved to 896% of the keeping helium dose at room temperature and HeTi atomic ratio reaches 44%. Even if the specimen temperature up to 400 ℃, the helium concentration still can be preserved to 326% of the keeping helium dose at room temperature and the HeTi atomic ratio is 171%. Possible mechanism of helium effectively preserved in the nanocrystal titanium film is discussed based on the energy stability viewpoint.

关 键 词：纳米晶粒钛膜 氦 卢瑟福质子背散射 浓度 温度 氢 氚 

分 类 号：TB383[一般工业技术—材料科学与工程]