刻蚀波导粗糙面散射的矩量法数值分析  

Analysis of the Scattering from an Etched Rough Surface Using a Moment Method

作　　者：宋军[1] 何赛灵[1] 

机构地区：[1]浙江大学现代光学仪器国家重点实验室,光及电磁波研究中心杭州310027

出　　处：《光子学报》2003年第11期1312-1315,共4页Acta Photonica Sinica

基　　金：浙江省科技计划重大项目 (项目编号 0 0 1 1 0 1 0 2 7)

摘　　要：用矩量法对刻蚀波导粗糙面的散射特性做出了精确的数值分析 基于MonteCarlo方法建立高斯粗糙面数学模型 ,证明矩量法在分析刻蚀波导散射问题时 ,是可以应用于不同起伏高度、不同入射角的一种精确而高效的数值方法 对不同起伏高度的两种偏振态 ,分别在小角度入射和大角度入射两种情况的随机散射特性应用矩量法做出了分析 并以基于二氧化硅波导的EDG器件为例 。A numerical moment method is used to calculate and analyze the scattering from an etched rough surface of a slab waveguide. The rough surface is generated with a Monte Carlo method. It is shown that the present method is always effective and efficient for different standard deviations of Gaussian height distribution and different incident angles. The relation between the backscattering coefficients and the standard deviations of Gaussian height distribution is analyzed for both polarizations with small or large incident angle. The influence of the etched rough surface on the spectral response of an etched diffraction grating demultiplexer is considered as an example.

关 键 词：粗糙面 散射 矩量法 Moilte CARLO方法 平面波导 刻蚀衍射光栅(EDG) 

分 类 号：TN814.1[电子电信—信息与通信工程]