TPP-1型椭偏谱仪测膜厚的探讨  

Investigation on the type of TPP-1 the ellipsometer for measuring the thickness of thin films

作　　者：吴永汉[1] 李艳峰[2] 吴兴惠[2] 

机构地区：[1]云南大学物理系,云南昆明650091 [2]云南大学材料科学与工程系,云南昆明650091

出　　处：《云南大学学报（自然科学版）》2003年第6期515-517,共3页Journal of Yunnan University(Natural Sciences Edition)

基　　金：国家自然科学基金资助项目(50162002).

摘　　要：说明原椭偏谱仪不能直接测量膜厚,提出外加波长片后可以测量膜厚的2种方法.It is shown that the conventional ellipsometer can not be used to measuring the films' thickness.To solve this problem,it is suggested thst two kinds of methods for measuring the thickness of thin films by addition of filter wavelength leaf.

关 键 词：椭偏谱仪 薄膜厚度 位相差 测量 波长片 光电参数 

分 类 号：O484.5[理学—固体物理] TH744.21[理学—物理]