压电谐振式微悬臂梁气体传感器  

Piezoelectric Resonance Microcantilever GAS Sensor

作　　者：周嘉[1,2] 黎坡[1] 黄宜平[1] 张松[3] 周峰[3] 杨芃原[3] 鲍敏航[1] 

机构地区：[1]复旦大学微电子学系,国家专用集成电路与系统实验室,上海200433 [2]华东理工大学,石油化工学院机械系,上海201512 [3]复旦大学化学系,上海200433

出　　处：《压电与声光》2003年第5期358-362,共5页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金(30170266)

摘　　要：介绍了压电谐振式微悬臂梁的设计、制作方法和作为质量传感器的工作原理,及其在空气质量检测上的应用。实验结果验证了设计方法正确,制作工艺可行。在特定敏感层的作用下,该传感器对氟利昂气体在500×10^(-6)范围内的响应呈指数衰减,在100×10^(-6)范围内呈线性响应,灵敏度达-0.002 4％×10~6,最小可测质量为3.5×10^(-9)g。In this paper, design and fabrication of piezoelectric resonance microcantilever are introduced. As a mass sensor, its working principle and application in the field of air quality detection are also presented. The experimental results demonstrate the designing method is valid and the processing is feasible. By the action of a specific sensing layer, its responses to gas Freon decay exponentially within the range of 500×10-6 and approach linearity when the gas concentration is lower than 100×10-6 with sensitivity of -0.002 4%×106 and minimum detectable mass of 3.5×10-9g.

关 键 词：锆钛酸铅(PZT) 微悬臂梁 气敏传感器 

分 类 号：TN384[电子电信—物理电子学]