超精密加工振动误差源诊断实验研究  

Experimental Study of Vibration Error Sources Identification of Ultra Precision Machining

作　　者：郑德志[1] 卢泽生[1] 

机构地区：[1]哈尔滨工业大学机器工程学院,哈尔滨150001

出　　处：《高技术通讯》2003年第10期61-65,共5页Chinese High Technology Letters

基　　金：教育部博士点基金资助项目

摘　　要：超精密车床结构及加工过程的复杂性使得对加工精度的影响因素不能完全确定 ,尤其是随机性因素的影响更难确定。为此本文首先系统分析了超精密车床中影响加工精度的各项误差源 ,然后通过实验辨识了主要振动误差源对加工精度的影响 。The complexity of the structures of ultra precision machine tools and the machining processes governs that the factors that influence the machining accuracy cannot be all clearly determined, especially the stochastic ones. In this paper, the error sources of the ultra precision machine tool that contribute to the final machining errors were systematically analyzed and determined, and the influence of these error sources was evaluated experimentally, which can provide orientation to minimizing and compensating the errors induced by these error sources.

关 键 词：超精密车床 振动误差源诊断 加工精度 传感器 实验研究 

分 类 号：TH161[机械工程—机械制造及自动化]