气体对介质阻挡放电激发XeCl＊辐射的影响  

INFLUENCE OF GAS ON THE EMISSION OF EXCIMER XeCl* EXCITED BY DIELECTRIC BARRIER DISCHARGE

作　　者：徐金洲[1] 梁荣庆[1] 任兆杏[1] 程黎放 童惠君 

机构地区：[1]中国科学院等离子体物理研究所,合肥230031 [2]江苏苏净化工工程技术研究中心,苏州215008

出　　处：《核聚变与等离子体物理》2003年第4期243-247,共5页Nuclear Fusion and Plasma Physics

摘　　要：在气体配比和气压易控制的小尺寸气体混合腔中,通过对混合气体Cl2/Xe进行参量(配比、气压)范围调节,研究了不同气体配比、气压下介质阻挡放电激发准分子XeCl 的辐射特性。结果表明,在一定放电功率下,合适的气体配比和气压能产生峰值辐射。对于放电管在气体比例pC12/pt在1 5%～4%范围内,放电形貌及准分子XeCl 辐射的强度和光谱特征表现出明显的差异。同比条件下,混合气体He Cl2/Xe中放电产生的准分子辐射强度弱于混合气体Cl2/Xe。Influence of the gas parameters (gas ratio and pressure) on the excimer XeCl~ emission generated in dielectric barrier discharge (DBD) has been studied.The results show that a maximum radiation is achieved at suitable gas ratio and pressure under a constant input power level.The radiation shows great difference as the discharge mode changes from the filaments to a mode with the filaments scattered in glow-like background when the ratio of Cl_2/Xe varies in the range 1.5%～4%.At comparable conditions,this work shows that the radiation intensity generated in the gas mixture of He/Cl_2/Xe is less than that in Cl_2/Xe.

关 键 词：紫外辐射光源 准分子氯化氙 介质阻挡放电 光谱特征 气压 气体比 

分 类 号：O536[理学—等离子体物理]