溶胶-凝胶(sol-gel)法制作掺铒Al_2O_3薄膜及其光致发光光谱特性测量  

Er-doped Al_2O_3 Thin Films Fabricated by Sol-gel Processes and Measurement of Photoluminescence Characteristics

作　　者：李成仁[1] 宋昌烈[1] 李淑凤[1] 高景生[1] 

机构地区：[1]大连理工大学物理系

出　　处：《光子学报》2003年第12期1514-1517,共4页Acta Photonica Sinica

基　　金：国家自然科学基金 (No .6 988970 1);辽宁省科技厅资助项目 (No .2 0 0 2 2 110 );辽宁省教育厅资助项目 (2 0 2 12 3198);大连市科技局资助项目

摘　　要：介绍一种用溶胶 凝胶方法制作掺铒Al2 O3薄膜的工艺 实验测量了薄膜样品的光致发光光谱特性 结果表明光致发光光谱的峰值波长为 1.5 36 μm ,半值宽度为 34nm ;同时测量了光致发光光谱的峰值强度与泵浦功率。Fabrication technique of Er-doped Al_2O_3 thin films by the sol-gel processes is introduced. Photoluminescence characteristics of the samples are measured. The results show that the peak wavelength of the photoluminescence spectra is 1.536 μm and FWHM (Full Width at Half Maximum) is 34 nm.The dependence of the peak emission intensity on the pump power, the Er-doped concentrations, as well as the annealing temperature are investigated.

关 键 词：sol—gel法 掺铒Al2O3薄膜 光致发光特性 

分 类 号：TN248.1[电子电信—物理电子学]