微型机械的摩擦学特性及其表面润滑技术的研究  

Studies of Tribological Properties of Micro-electro-mechanical Systems and Its Surface Lubrication

作　　者：上官倩芡[1] 程先华[1] 

机构地区：[1]上海交通大学机械与动力工程学院

出　　处：《润滑与密封》2004年第1期87-89,共3页Lubrication Engineering

基　　金：上海市纳米科技专项基金(编号0252nm014)

摘　　要：综述了微型机械的摩擦学特性,阐述了微型机械中摩擦学问题研究的重要性,分析了影响微摩擦力的关键因素。基于目前国内外对微型机械表面润滑问题的研究现状,探讨了LB膜、自组装膜和分子沉积膜各自的特点及其在微型机械表面润滑领域的应用进展,对它们性能的优缺点进行了比较,并提出降低微型机械的表面能是减轻微摩擦磨损的有效措施。Tribological properties of micro-electro-mechanical systems (MEMS) were summarized, including significance of tribology for MEMS and key factors which effected micro tribology. Based on current state of surface lubrication studies on MEMS, characteristics of three kinds of ordered molecular films, LB film, self-assembled monolayer and molecular deposition film, were discussed respectively. Applications of the three kinds of ordered molecular films to surface lubrication of MEMS were briefly introduced, and their relative merits were analyzed. Moreover, an effective approach to reduce micro tribology in MEMS was proposed.

关 键 词：微型机械 摩擦学特性 微摩擦力 润滑 LB膜 自组装膜 分子沉积膜 

分 类 号：TH117[机械工程—机械设计及理论]